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MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Hsu, Tai-RanMaterial type: TextTextLanguage: English Publication details: Boston ; New Delhi : McGraw-Hill, Tata McGraw-Hill, c2002. Description: xii, 436 p. : ill. ; 24 cmISBN: 0072393912 (alk. paper); 007048709X; 9780072393910 Subject(s): Microelectronics | Microelectromechanical systems | Microelectronic packagingDDC classification: 621.381 LOC classification: TK7874 | .H794 2002Online resources: WorldCat details
Contents:
TOC Ch. 1. Overview of MEMS and Microsystems -- Ch. 2. Working Principles of Microsystems -- Ch. 3. Engineering Science for Microsystem Design and Fabrication -- Ch. 4. Engineering Mechanics for Microsystems Design -- Ch. 5. Thermofluid Engineering and Microsystem Design -- Ch. 6. Scaling Laws in Miniaturization -- Ch. 7. Materials for MEMS and Microsystems -- Ch. 8. Microsystem Fabrication Processes -- Ch. 9. Overview of Micromanufacturing -- Ch. 10. Microsystems Design -- Ch. 11. Microsystem Packaging.
Summary: Summary: Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics, Read more...
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Holdings
Item type Current library Collection Call number Copy number Status Date due Barcode Item holds
Text Text Dr. S. R. Lasker Library, EWU
Reserve Section 		Non-fiction 621.381 HSM 2002 (Browse shelf(Opens below)) C-1 Not For Loan 17082
Text Text Dr. S. R. Lasker Library, EWU
Reserve Section 		Non-fiction 621.381 HSM 2002 (Browse shelf(Opens below)) C-2 Not For Loan 17083
Text Text Dr. S. R. Lasker Library, EWU
Circulation Section 		Non-fiction 621.381 HSM 2002 (Browse shelf(Opens below)) C-3 Available 17084
Total holds: 0
Browsing Dr. S. R. Lasker Library, EWU shelves, Shelving location: Reserve Section Close shelf browser (Hides shelf browser)
621.381 GRB 2003 Basic electronics / 621.381 GRD 1999 Digital electronics / 621.381 HSM 2002 MEMS and microsystems : 621.381 HSM 2002 MEMS and microsystems : 621.381 HUH 2002 Hughes electrical and electronic technology / 621.381 JAM 1997 Modern digital electronics / 621.381 JAM 2003 Modern digital electronics /

Online version:
Hsu, Tai-Ran.
MEMS and microsystems.
Boston : McGraw-Hill, c2002
(OCoLC)606625978

Includes bibliographical references (p. 427-431) and index.

TOC Ch. 1. Overview of MEMS and Microsystems --
Ch. 2. Working Principles of Microsystems --
Ch. 3. Engineering Science for Microsystem Design and Fabrication --
Ch. 4. Engineering Mechanics for Microsystems Design --
Ch. 5. Thermofluid Engineering and Microsystem Design --
Ch. 6. Scaling Laws in Miniaturization --
Ch. 7. Materials for MEMS and Microsystems --
Ch. 8. Microsystem Fabrication Processes --
Ch. 9. Overview of Micromanufacturing --
Ch. 10. Microsystems Design --
Ch. 11. Microsystem Packaging.

Summary:
Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics, Read more...

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