MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02040cam a22003734a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
4649 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
BD-DhEWU |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20140521211509.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
060213r20022004ii a g b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0072393912 (alk. paper) |
|
|---|
| International Standard Book Number |
007048709X |
|
|---|
| International Standard Book Number |
9780072393910 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)47893369 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
DLC |
| -- |
BD-DhEWU |
| Language of cataloging |
eng |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7874 |
| Item number |
.H794 2002 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Edition number |
|
| Item number |
HSM 2002 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Hsu, Tai-Ran. |
| 9 (RLIN) |
9440 |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
MEMS and microsystems : |
| Remainder of title |
design and manufacture / |
| Statement of responsibility, etc |
Tai-Ran Hsu. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Boston ; |
| -- |
New Delhi : |
| Name of publisher, distributor, etc |
McGraw-Hill, |
| -- |
Tata McGraw-Hill, |
| Date of publication, distribution, etc |
c2002. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 436 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Online version:<br/>Hsu, Tai-Ran.<br/>MEMS and microsystems.<br/>Boston : McGraw-Hill, c2002<br/>(OCoLC)606625978 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references (p. 427-431) and index. |
| 505 ## - FORMATTED CONTENTS NOTE |
|---|
| Title |
TOC |
| Formatted contents note |
Ch. 1. Overview of MEMS and Microsystems --<br/>Ch. 2. Working Principles of Microsystems --<br/>Ch. 3. Engineering Science for Microsystem Design and Fabrication --<br/>Ch. 4. Engineering Mechanics for Microsystems Design --<br/>Ch. 5. Thermofluid Engineering and Microsystem Design --<br/>Ch. 6. Scaling Laws in Miniaturization --<br/>Ch. 7. Materials for MEMS and Microsystems --<br/>Ch. 8. Microsystem Fabrication Processes --<br/>Ch. 9. Overview of Micromanufacturing --<br/>Ch. 10. Microsystems Design --<br/>Ch. 11. Microsystem Packaging. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Summary:<br/>Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics, Read more...<br/> |
| 526 ## - STUDY PROGRAM INFORMATION NOTE |
|---|
| Program name |
EEE |
| 590 ## - LOCAL NOTE (RLIN) |
|---|
| Local note |
Saifun Momota |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectronics. |
| 9 (RLIN) |
9231 |
|
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems. |
| 9 (RLIN) |
1072 |
|
|---|
| Topical term or geographic name as entry element |
Microelectronic packaging. |
| 9 (RLIN) |
9441 |
| 856 ## - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
WorldCat details |
| Uniform Resource Identifier |
http://www.worldcat.org/title/mems-and-microsystems-design-and-manufacture/oclc/47893369&referer=brief_results |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Text |