000			02040cam a22003734a 4500
001			4649
003			BD-DhEWU
005			20140521211509.0
008			060213r20022004ii a g b 001 0 eng d
010			_a2001044737
020			_a0072393912 (alk. paper)
020			_a007048709X
020			_a 9780072393910
035			_a(OCoLC)47893369
040			_aDLC _cDLC _dDLC _dBD-DhEWU _beng
041			_aeng
050	0	0	_aTK7874 _b.H794 2002
082	0	4	_a621.381 _2 _bHSM 2002
100	1		_aHsu, Tai-Ran. _99440
245	1	0	_aMEMS and microsystems : _bdesign and manufacture / _cTai-Ran Hsu.
260			_aBoston ; _aNew Delhi : _bMcGraw-Hill, _bTata McGraw-Hill, _cc2002.
300			_axii, 436 p. : _bill. ; _c24 cm.
500			_aOnline version: Hsu, Tai-Ran. MEMS and microsystems. Boston : McGraw-Hill, c2002 (OCoLC)606625978
504			_aIncludes bibliographical references (p. 427-431) and index.
505			_tTOC _aCh. 1. Overview of MEMS and Microsystems -- Ch. 2. Working Principles of Microsystems -- Ch. 3. Engineering Science for Microsystem Design and Fabrication -- Ch. 4. Engineering Mechanics for Microsystems Design -- Ch. 5. Thermofluid Engineering and Microsystem Design -- Ch. 6. Scaling Laws in Miniaturization -- Ch. 7. Materials for MEMS and Microsystems -- Ch. 8. Microsystem Fabrication Processes -- Ch. 9. Overview of Micromanufacturing -- Ch. 10. Microsystems Design -- Ch. 11. Microsystem Packaging.
520			_aSummary: Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics, Read more...
526			_aEEE
590			_aSaifun Momota
650		0	_aMicroelectronics. _99231
650		0	_aMicroelectromechanical systems. _91072
650		0	_aMicroelectronic packaging. _99441
856			_3WorldCat details _uhttp://www.worldcat.org/title/mems-and-microsystems-design-and-manufacture/oclc/47893369&referer=brief_results
942			_2ddc _cTEXT
999			_c4649 _d4649