TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - MEMS and microsystems: design and manufacture 
SN  - 0072393912 (alk. paper)
AV  - TK7874 .H794 2002
U1  - 621.381  
PY  - 2002///
CY  - Boston, New Delhi
PB  - McGraw-Hill, Tata McGraw-Hill
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Online version:
Hsu, Tai-Ran.
MEMS and microsystems.
Boston : McGraw-Hill, c2002
(OCoLC)606625978; Includes bibliographical references (p. 427-431) and index; TOC; Ch. 1. Overview of MEMS and Microsystems --
Ch. 2. Working Principles of Microsystems --
Ch. 3. Engineering Science for Microsystem Design and Fabrication --
Ch. 4. Engineering Mechanics for Microsystems Design --
Ch. 5. Thermofluid Engineering and Microsystem Design --
Ch. 6. Scaling Laws in Miniaturization --
Ch. 7. Materials for MEMS and Microsystems --
Ch. 8. Microsystem Fabrication Processes --
Ch. 9. Overview of Micromanufacturing --
Ch. 10. Microsystems Design --
Ch. 11. Microsystem Packaging; EEE
N2  - Summary:
Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics,  Read more

UR  - http://www.worldcat.org/title/mems-and-microsystems-design-and-manufacture/oclc/47893369&referer=brief_results
ER  -